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Mask-maskless etching behaviour of convex corners at the ridges oriented in <110> direction on {100} Si
| Title: | Mask-maskless etching behaviour of convex corners at the ridges oriented in <110> direction on {100} Si | Authors: | Jović, Vesna  ; Smiljanić, Milče  ; Lamovec, Jelena ; Mirjana Popović |
Issue Date: | 2010 | Publication: | Proc. of 2nd ReCIMICo(Reinforcement of the Centre for Integrated Microsystems and Components) Workshop on New Trends in Integrated Microsystems and Components | Publisher: | University of Novi Sad, Faculty of Technical Science, Srbija | Type: | Conference Paper | ISBN: | 978-86-7892-287-9  Search Idenfier |
Collation: | str. 3-9 | URI: | https://enauka.gov.rs/handle/123456789/367273 | URL: | http://www.cimc.rs/index.php/3-news/news/84-second-recimico-workshop40 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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