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The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures
| Title: | The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures | Authors: | Radmilović-Rađenović, Marija   ; Radjenović, B.; Puač, Marija |
Issue Date: | 2011 | Publication: | International Journal of Numerical Modelling: Electronic Networks, Devices and Fields | ISSN: | 0894-3370 International Journal of Numerical Modelling: Electronic Networks, Devices and Fields Search Idenfier |
Type: | Article | Collation: | vol. 24 br. 6 str. 535-544 | DOI: | 10.1002/jnm.798 | WoS-ID: | 000296239400004 | Scopus-ID: | 2-s2.0-80054816238 | URI: | https://enauka.gov.rs/handle/123456789/387710 | Metadata source: | Migrirano iz RIS podataka | M-category: | 23M23 |
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