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Title: The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures
Authors: Radmilović-Rađenović, Marija  ; Radjenović, B.; Puač, Marija  
Issue Date: 2011
Publication: International Journal of Numerical Modelling: Electronic Networks, Devices and Fields
ISSN: 0894-3370 International Journal of Numerical Modelling: Electronic Networks, Devices and Fields Search Idenfier
Type: Article
Collation: vol. 24 br. 6 str. 535-544
DOI: 10.1002/jnm.798
WoS-ID: 000296239400004
Scopus-ID: 2-s2.0-80054816238
URI: https://enauka.gov.rs/handle/123456789/387710
Metadata source: Migrirano iz RIS podataka
M-category: 
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