Determination of the Etching Rate from the Silicon Symmetry Properties by Extension of the Level Set Method

Radmilović-Rađenović, Marija; Rađenović, Branislav

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Title:	Determination of the Etching Rate from the Silicon Symmetry Properties by Extension of the Level Set Method
Authors:	Radmilović-Rađenović, Marija ; Rađenović, Branislav
Issue Date:	2011
Publication:	International Review of Electrical Engineering / IREE
ISSN:	1827-6660 International Review of Electrical Engineering / IREE Search Idenfier
Publisher:	Praise Worthy Prize
Type:	Article
Collation:	vol. 5 br. 3 str. 1045-1052
WoS-ID:	000280934900028
URI:	https://enauka.gov.rs/handle/123456789/395157
URL:	http://www.praiseworthyprize.org/jsm/?journal=iree
Metadata source:	Migrirano iz RIS podataka
M-category:	22M22

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