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High Energy Nitrogen Ions Channeling Implantation in <110> and Randomly Oriented Silicon Crystals
| Title: | High Energy Nitrogen Ions Channeling Implantation in <110> and Randomly Oriented Silicon Crystals | Authors: | Erić, Marko |
Issue Date: | 2011 | Publication: | M. Erić, S. Petrović, M. Kokkoris, A. Lagoyannis, V. Paneta, S. Harissopulos, F. Munnik, I. Telečki, High Energy Nitrogen Ions Channeling Implantation in <110> and Randomly Oriented Silicon Crystals, SFKM 2011, April 18-22, Book of Abstracts, (2011) p. 70 | Publisher: | Srbija | Type: | Conference Paper | Collation: | str. 70-70 | URI: | https://enauka.gov.rs/handle/123456789/459528 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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