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Title: Probe diagnostics of a large scale asymmetric capacitively coupled plasma plasma reactor
Authors: Lazović, Saša  ; Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  ; Uroš Cvelbar; Miran Mozetič
Issue Date: 2011
Publication: 18th Inernational scientific meeting on vacuum science and techniques
Publisher: Slovenia
Type: Conference Paper
Collation: str. 52-52
URI: https://enauka.gov.rs/handle/123456789/463086
Metadata source: Migrirano iz RIS podataka
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