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Characterization of atomic oxygen emission by PROES and Ion-flux measurement in an ECR plasma etcher
| Title: | Characterization of atomic oxygen emission by PROES and Ion-flux measurement in an ECR plasma etcher | Authors: | Milosavljević, Vladimir   ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels |
Issue Date: | 2011 | Publication: | The AVS 58th International Symposium and Exhibition, Nashville, Tennessee, USA | Publisher: | AVS, SAD | Type: | Conference Paper | Collation: | str. PS-ThA1.87-PS-ThA1.87 | URI: | https://enauka.gov.rs/handle/123456789/463093 | URL: | http://www2.avs.org/symposium/AVS58/pages/greetings.html | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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