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| Title: | Comprehensive plasma diagnostics for an ECR etcher | Authors: | Milosavljević, Vladimir   |
Issue Date: | 2012 | Publication: | 26th Summer School and International Symposium on the Physics of Ionized Gases | ISSN: | 0094-243X AIP Conference Proceedings Search Idenfier |
Publisher: | AIP, Melville, New York, Srbija | Type: | Conference Paper | Collation: | vol. 385 str. 340-352 | URI: | https://enauka.gov.rs/handle/123456789/477722 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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