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Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching
| Title: | Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching | Authors: | Jović, Vesna  ; Lamovec, Jelena  ; Mladenović, Ivana ; Smiljanić, Milče ; Popović, Bogdan |
Issue Date: | 2014 | Publication: | Proceedings of the International Conference on Microelectronics, ICM | ISSN: | 2159-1660  Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | Collation: | str. 163-166 | DOI: | 10.1109/MIEL.2014.6842111 | WoS-ID: | 000360788600031 | Scopus-ID: | 2-s2.0-84904704435 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/1451 https://enauka.gov.rs/handle/123456789/480289 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) | M-category: | Mp. category will be shown later |
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