Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching

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Naziv:	Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching
Autori:	Jović, Vesna ; Lamovec, Jelena ; Mladenović, Ivana ; Smiljanić, Milče ; Popović, Bogdan
Godina:	2014
Publikacija:	Proceedings of the International Conference on Microelectronics, ICM
ISSN:	2159-1660 Pretraži identifikator
Izdavač:	Institute of Electrical and Electronics Engineers Inc.
Tip rezultata:	Konferencijski rad
Kolacija:	str. 163-166
DOI:	10.1109/MIEL.2014.6842111
WoS-ID:	000360788600031
Scopus-ID:	2-s2.0-84904704435
URI:	https://cer.ihtm.bg.ac.rs/handle/123456789/1451 https://enauka.gov.rs/handle/123456789/480289
Projekat:	Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008)
M-kategorija:	Mp kategorija će biti prikazana naknadno.

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