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Title: Characterization of a large scale RF CCP reactor using Langmuir and derivative probes
Authors: Lazović, Saša  ; Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  
Issue Date: 2011
Publication: The 20th International Symposium on Plasma Chemistry
Publisher: USA
Type: Conference Paper
Collation: str. SOU09-1-SOU09-4
URI: https://enauka.gov.rs/handle/123456789/525053
Metadata source: Migrirano iz RIS podataka
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