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Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
| Title: | Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies | Authors: | Petrović, Z. Lj.   ; Raspopović, Zoran M. ; Stojanović, Vladimir D.; Jovanović, Jasmina ; Malović, G. ; Makabe, T.; de Urquijo, J. |
Issue Date: | 2007 | Publication: | Applied Surface Science | ISSN: | 0169-4332 Applied Surface Science Search Idenfier |
Publisher: | Elsevier, Amsterdam | Type: | Article | Collation: | vol. 253 br. 16 str. 6619-6640 | DOI: | 10.1016/j.apsusc.2007.02.005 | WoS-ID: | 000247156100002 | Scopus-ID: | 2-s2.0-34248661268 | URI: | https://machinery.mas.bg.ac.rs/handle/123456789/731 https://enauka.gov.rs/handle/123456789/567908 |
Project: | Физичке основе примене неравнотежних плазми у нанотехнологијама и третману материјала | M-category: | 22M22 |
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