Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors

Olthoff J. K; Roberts J. R; Van-Brunt R. J; Whetstone J. R; Sobolewski M. A; Djurović Stevica

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eNauka > Results > Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors

Title:	Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors
Authors:	Olthoff J. K; Roberts J. R; Van-Brunt R. J; Whetstone J. R; Sobolewski M. A; Djurović Stevica
Issue Date:	1991
Publication:	Process Module Metrology, Control, and Clustering, Process Module Metrology, Control, and Clustering, San Hose, USA, 1991
Type:	Conference Paper
Collation:	str. 168-178
URI:	https://www.cris.uns.ac.rs/record.jsf?recordId=7513&source=eNauka&language=en https://enauka.gov.rs/handle/123456789/587007 https://cris.uns.ac.rs/en/scientific-results/proceedings-publication/34921
M-category:	Mp. category will be shown later

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