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A comparison of different convex corner compensation strucutures applicable in anisotropic wet chemical etching of {100} oriented silicon
| Title: | A comparison of different convex corner compensation strucutures applicable in anisotropic wet chemical etching of {100} oriented silicon | Authors: | Jović, Vesna  ; Lamovec, Jelena  ; Smiljanić, Milče M. ; Lazić, Žarko ; Popović, Bogdan ; Poljak, Predrag |
Issue Date: | 2016 | Publication: | Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, Belgrade, Serbia | Publisher: | Belgrade : The Military Technical Institute | Type: | Conference Paper | ISBN: | 978-86-81123-82-9  Search Idenfier |
URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/5775 https://enauka.gov.rs/handle/123456789/597719 |
Project: | Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине | M-category: | Mp. category will be shown later |
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