Creation of silicon submicron structures by compression plasma flow action

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Naziv:	Creation of silicon submicron structures by compression plasma flow action
Autori:	Purić, Jagoš ; Astashynski, Valentin M.; Dojčinović, Ivan ; Kuraica, Milorad
Godina:	2004
Publikacija:	Vacuum
ISSN:	0042-207X Vacuum Pretraži identifikator
Tip rezultata:	Konferencijski rad
Kolacija:	vol. 73 br. 3-4 str. 561-566
DOI:	10.1016/j.vacuum.2003.12.087
WoS-ID:	000220928900037
Scopus-ID:	2-s2.0-1842582444
URI:	https://physrep.ff.bg.ac.rs/handle/123456789/317 https://enauka.gov.rs/handle/123456789/606621
M-kategorija:	Mp kategorija će biti prikazana naknadno.

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