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Title: Optimization of plasma etch rate of deposited thin films by adaptive neuro fuzzy inference system
Authors: Petrovic, Nikola  
Issue Date: 2022
Publication: The International Journal of Advanced Manufacturing Technology
ISSN: 0268-3768 International Journal of Advanced Manufacturing Technology Search Idenfier
Type: Article
Collation: vol. 123 br. 1-2 str. 111-118
DOI: 10.1007/s00170-022-10198-z
WoS-ID: 000857809900001
Scopus-ID: 2-s2.0-85138733374
URI: https://enauka.gov.rs/handle/123456789/761724
Metadata source: (Preuzeto iz CrossRef-a) Petrovic, Nikola
M-category: 
22M22

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