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Optimization of plasma etch rate of deposited thin films by adaptive neuro fuzzy inference system
| Title: | Optimization of plasma etch rate of deposited thin films by adaptive neuro fuzzy inference system | Authors: | Petrovic, Nikola |
Issue Date: | 2022 | Publication: | The International Journal of Advanced Manufacturing Technology | ISSN: | 0268-3768 International Journal of Advanced Manufacturing Technology Search Idenfier |
Type: | Article | Collation: | vol. 123 br. 1-2 str. 111-118 | DOI: | 10.1007/s00170-022-10198-z | WoS-ID: | 000857809900001 | Scopus-ID: | 2-s2.0-85138733374 | URI: | https://enauka.gov.rs/handle/123456789/761724 | Metadata source: | (Preuzeto iz CrossRef-a) Petrovic, Nikola | M-category: | 22M22 |
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