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The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and selforganized assembly of nanostructures
| Title: | The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and selforganized assembly of nanostructures | Authors: | Petrović, Z.Lj.; Malović, G.   ; Radmilović-Radjenović, M. ; Puač, N. ; Marić, D.; Maguire, P.; Mahony, C. |
Issue Date: | 2006 | Publication: | 25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS | Publisher: | 2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings | Type: | Conference Paper | Collation: | str. 39-46 | DOI: | 10.1109/ICMEL.2006.1650893 | WoS-ID: | 000238839700006 | Scopus-ID: | 2-s2.0-77956548030 | URI: | https://enauka.gov.rs/handle/123456789/773761 | Metadata source: | (Preuzeto iz ORCID-a) Puac, Nevena | M-category: | Mp. category will be shown later |
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