The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and selforganized assembly of nanostructures

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Naziv:	The role of non-equilibrium plasmas and micro-discharges in top down nanotechnologies and selforganized assembly of nanostructures
Autori:	Petrović, Z.Lj. ; Malović, G. ; Radmilović-Radjenović, M. ; Puač, N. ; Marić, D.; Maguire, P.; Mahony, C.
Godina:	2006
Publikacija:	25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS
Izdavač:	2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings
Tip rezultata:	Konferencijski rad
Kolacija:	str. 39-46
DOI:	10.1109/ICMEL.2006.1650893
WoS-ID:	000238839700006
Scopus-ID:	2-s2.0-77956548030
URI:	https://enauka.gov.rs/handle/123456789/773761
Izvor metapodataka:	(Preuzeto iz ORCID-a) Puac, Nevena
M-kategorija:	Mp kategorija će biti prikazana naknadno.

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