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Modelling of a plasma etcher for charging free processing of nanoscale structures
| Title: | Modelling of a plasma etcher for charging free processing of nanoscale structures | Authors: | Stojkovic, A.; Nikitovic, Z.   ; Strinic, A. ; Stojanovic, V.; Radjenovic, Radmilovic M. ; Petrovic, Z. Lj. |
Issue Date: | 2005 | Publication: | The Seventh Yugoslav Materials Research Society Conference “YUCOMAT”, Book of Abstracts, Editor: Prof. dr Dragan P. Uskoković 12-16 September 2005, Herceg-Novi, Serbia and Montenegro (2005) [P.S.C.24.] 150 | Type: | Conference Paper | URI: | https://enauka.gov.rs/handle/123456789/782131 | URL: | https://www.mrs-serbia.org.rs/index.php/y2005/y2005b | Metadata source: | (Preuzeto iz ORCID-a) Nikitovic, Zeljka | M-category: | Mp. category will be shown later |
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