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| Title: | The role of radicals in kinetics of plasma etchers in Ar/CF4 mixtures | Authors: | Nikitovic, Z.   ; Stojanovic, V.; Petrovic, Z. Lj. |
Issue Date: | 2008 | Publication: | The Tenth Yugoslav Materials Research Society Conference “YUCOMAT”, Book of Abstracts, Editor: Prof. dr Dragan P. Uskoković 8-12 September 2008, Herceg-Novi, Montenegro (2008) [P.S.B.16] 105 | Type: | Conference Paper | URI: | https://enauka.gov.rs/handle/123456789/782282 | URL: | https://dais.sanu.ac.rs/bitstream/id/19959/122.pdf | Metadata source: | (Preuzeto iz ORCID-a) Nikitovic, Zeljka | M-category: | Mp. category will be shown later |
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