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| Title: | Dynamic of the profile charging in two frequency plasma etching of SiO2 | Authors: | Radjenovic, B.; Radjenovic, Radmilovic M.   ; Petrovic, Z. Lj.; Nikitovic, Z. |
Issue Date: | 2007 | Publication: | The Ninth Yugoslav Materials Research Society Conference “YUCOMAT”, Book of Abstracts, Editor: Prof. dr Dragan P. Uskoković 10-14 September 2007, Herceg-Novi, Montenegro (2007) [P.S.B.11] 109 | Type: | Conference Paper | URI: | https://enauka.gov.rs/handle/123456789/782285 | URL: | https://dais.sanu.ac.rs/bitstream/id/19963/126.pdf | Metadata source: | (Preuzeto iz ORCID-a) Nikitovic, Zeljka | M-category: | Mp. category will be shown later |
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