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Title: 3D simulations of the profile evolution during anisotropic wet etching of silicon
Authors: Radjenovic, Branislav M  ; Radmilovic-Radjenovic, Marija D  
Issue Date: 2009
Publication: THIN SOLID FILMS
ISSN: 0040-6090 Thin Solid Films Search Idenfier
Type: Conference Paper
Collation: vol. 517 br. 14 str. 4233-4237
DOI: 10.1016/j.tsf.2009.02.007
WoS-ID: 000266696100102
Scopus-ID: 2-s2.0-65449147558
URI: https://enauka.gov.rs/handle/123456789/796778
Metadata source: (Preuzeto iz Nasi u WoS)
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