Results
eNauka >
Rezultati >
3D simulations of the profile evolution during anisotropic wet etching of silicon
| Naziv: | 3D simulations of the profile evolution during anisotropic wet etching of silicon | Autori: | Radjenovic, Branislav M   ; Radmilovic-Radjenovic, Marija D |
Godina: | 2009 | Publikacija: | THIN SOLID FILMS | ISSN: | 0040-6090 Thin Solid Films Pretraži identifikator |
Tip rezultata: | Konferencijski rad | Kolacija: | vol. 517 br. 14 str. 4233-4237 | DOI: | 10.1016/j.tsf.2009.02.007 | WoS-ID: | 000266696100102 | Scopus-ID: | 2-s2.0-65449147558 | URI: | https://enauka.gov.rs/handle/123456789/796778 | Izvor metapodataka: | (Preuzeto iz Nasi u WoS) | M-kategorija: | Mp kategorija će biti prikazana naknadno. |
Items in eNauka are protected by copyright, with all rights reserved, unless otherwise indicated.