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Title: Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas
Authors: Curley, GA; Marić, Dragana  ; Booth, JP; Corr, CS; Chabert, P; Guillon, J
Issue Date: 2007
Publication: PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN: 0963-0252 Plasma Sources Science and Technology Search Idenfier
Type: Article
Collation: vol. 16 br. 1 str. S87-S93
DOI: 10.1088/0963-0252/16/1/S09
WoS-ID: 000244370700011
Scopus-ID: 2-s2.0-33947635106
URI: https://enauka.gov.rs/handle/123456789/797876
Metadata source: (Preuzeto iz Nasi u WoS)
M-category: 
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