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| Title: | On the Role of Radicals in Kinetics of Plasma Etchers in Ar/CF4 Mixtures | Authors: | Nikitovic, Zeljka D   ; Stojanovic, Vladimir D; Petrovic, Zoran Lj |
Issue Date: | 2009 | Publication: | ACTA PHYSICA POLONICA A | ISSN: | 0587-4246 Acta Physica Polonica. Series A: General Physics, Physics of Condensed Matter, Optics and Quantum Electronics, Atomic and Molecular Physics, Applied Physics Search Idenfier |
Type: | Article | Collation: | vol. 115 br. 4 str. 765-767 | WoS-ID: | 000265755200002 | URI: | https://enauka.gov.rs/handle/123456789/805095 | Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | 23M23 |
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