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eNauka >  Results >  Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching
Title: Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching
Authors: Makabe, Toshiaki; Petrovic, Zoran Lj  
Issue Date: 2002
Publication: APPLIED SURFACE SCIENCE
ISSN: 0169-4332 Applied Surface Science Search Idenfier
Type: Article
Collation: vol. 192 br. 1-4 str. 88-114
DOI: 10.1016/S0169-4332(02)00022-3
WoS-ID: 000177240000006
Scopus-ID: 2-s2.0-0037198332
URI: https://enauka.gov.rs/handle/123456789/807619
Metadata source: (Preuzeto iz Nasi u WoS)
M-category: 
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