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| Title: | Electron kinetics in plasma etching devices containing carbon tetrafluoride | Authors: | Dujko, Sasa   ; Raspopović, Zoran ; Petrovic, Zoran Lj |
Issue Date: | 2002 | Publication: | APPLIED PHYSICS IN SERBIA-APS | Type: | Conference Paper | Collation: | str. 245-248 | WoS-ID: | 000188097800046 | URI: | https://enauka.gov.rs/handle/123456789/810474 | Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | Mp. category will be shown later |
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