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Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
| Title: | Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma | Authors: | Kitajima, T; Takeo, Y; Petrovic, Zoran Lj   ; Makabe, Toshiaki |
Issue Date: | 2000 | Publication: | APPLIED PHYSICS LETTERS | ISSN: | 0003-6951 Applied Physics Letters Search Idenfier |
Type: | Article | Collation: | vol. 77 br. 4 str. 489-491 | DOI: | 10.1063/1.127020 | WoS-ID: | 000088225400010 | Scopus-ID: | 2-s2.0-0001480674 | URI: | https://enauka.gov.rs/handle/123456789/822114 | Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | 21a+M21a+ |
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