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Defect behaviors in n-channel power VDMOSFETs during HEFS and thermal post-HEFS annealing
| Title: | Defect behaviors in n-channel power VDMOSFETs during HEFS and thermal post-HEFS annealing | Authors: | Ristic, Goran S |
Issue Date: | 2006 | Publication: | APPLIED SURFACE SCIENCE | ISSN: | 0169-4332 Applied Surface Science Search Idenfier |
Type: | Article | Collation: | vol. 252 br. 8 str. 3023-3032 | DOI: | 10.1016/j.apsusc.2005.05.005 | WoS-ID: | 000235721800045 | Scopus-ID: | 2-s2.0-31144459484 | URI: | https://enauka.gov.rs/handle/123456789/827675 | Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | 21M21 |
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