Rezultati
| Title: | Modeling of plasmas for dry etching in ULSI technologies | Authors: | Petrovic, Z.Lj.; Sakadzic, S.; Raspopović, Zoran   ; Makabe, T. |
Issue Date: | 1999 | Publication: | 2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings | Type: | Conference Paper | ISBN: | 0780352351, 978-078035235-3 ИСБН није валидан Search Idenfier |
Collation: | vol. 2 str. 433-436 | DOI: | 10.1109/icmel.2000.838726 | Scopus-ID: | 2-s2.0-0033297973 | URI: | https://enauka.gov.rs/handle/123456789/852761 | URL: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0033297973&partnerID=MN8TOARS | Metadata source: | (Preuzeto iz ORCID-a) Raspopović, Zoran | M-category: | Mp. category will be shown later |
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