Results
| Title: | A new multi-layer ion implantation model for process simulation | Authors: | Pantić, Dragan   ; Miljković, S.; Stojadinović, Ninoslav |
Issue Date: | 1989 | Publication: | Microelectronics Journal | ISSN: | 0026-2692 Microelectronics Journal Search Idenfier |
Publisher: | Elsevier {BV} | Type: | Article | Collation: | vol. 20 br. 6 str. 5-10 | DOI: | 10.1016/0026-2692(89)90062-1 | Scopus-ID: | 2-s2.0-0024765845 | URI: | https://enauka.gov.rs/handle/123456789/880478 | Metadata source: | (Preuzeto iz ORCID-a) Pantić, Dragan | M-category: | Mp. category will be shown later |
Items in eNauka are protected by copyright, with all rights reserved, unless otherwise indicated.