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Influence of the in-situ deposited SiNX interlayer on the crystalline quality of MOVPE grown thin GaN films
| Title: | Influence of the in-situ deposited SiNX interlayer on the crystalline quality of MOVPE grown thin GaN films | Authors: | Miljević, Bojan   ; Barchuk, Mykhailo; Krause, Baerbel; Holy, Vaclav; Baumbach, Tilo; Scholz, Ferdinand; Hertkorn, Joachim; Darma, M.S.D. |
Issue Date: | 2009 | Publication: | 13th European Workshop on Metalorganic Vapour Phase Epitaxy EWMOVPE 2009, Ulm 7th – 10th June 2009 | Publisher: | Ulm: Institute of Optoelectronics, Ulm University | Type: | Conference Paper | Collation: | str. 213-216 | URI: | https://enauka.gov.rs/handle/123456789/893556 | Metadata source: | (Preuzeto iz KNR-a) Miljević, Bojan | Availability note: | Подаци и/или пуни текст су непотпуни | M-category: | Mp. category will be shown later |
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