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Influence of As ions implantation on electrical resistivity of TiN/Ti/Si structures
| Title: | Influence of As ions implantation on electrical resistivity of TiN/Ti/Si structures | Authors: | Peruško, Davor   ; Milosavljević, M.; Radović, Ivan ; Milinović, V.; Bibić, Nataša |
Issue Date: | 2002 | Publication: | SPIG 2002 : 21st Summer School and International Symposium on the Physics of Ionized Gases : Contributed papers & abstracts of invited lectures, topical invited lectures, progress reports and workshop lectures | Publisher: | Niš : University of Niš, Faculty of Sciences and Mathematics - Department of Physics | Type: | Conference Paper | ISBN: | 86-83481-07-7  Search Idenfier |
Collation: | str. 242-245 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/12855 https://enauka.gov.rs/handle/123456789/894100 |
M-category: | Mp. category will be shown later |
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