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Influence of As ions implantation on electrical resistivity of TiN/Ti/Si structures
Naziv: | Influence of As ions implantation on electrical resistivity of TiN/Ti/Si structures | Autori: | Peruško, Davor ![]() ![]() ![]() ![]() |
Godina: | 2002 | Publikacija: | SPIG 2002 : 21st Summer School and International Symposium on the Physics of Ionized Gases : Contributed papers & abstracts of invited lectures, topical invited lectures, progress reports and workshop lectures | Izdavač: | Niš : University of Niš, Faculty of Sciences and Mathematics - Department of Physics | Tip rezultata: | Konferencijski rad | ISBN: | 86-83481-07-7![]() ![]() |
Kolacija: | str. 242-245 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/12855 https://enauka.gov.rs/handle/123456789/894100 |
M-kategorija: | Mp kategorija će biti prikazana naknadno. |
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