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eNauka >  Results >  Global search algorithms in an automated design of starting points for a deep-UV lithography objective
Title: Global search algorithms in an automated design of starting points for a deep-UV lithography objective
Authors: Zoric, Nenad; Nie, Yunfeng; Thibault, Simon; Prodanovic, Radomir; Thomas, Lijo
Issue Date: 2024
Publication: APPLIED OPTICS
ISSN: 1559-128X Applied Optics Search Idenfier
Type: Article
Collation: vol. 63 br. 26 str. 6960-6960
DOI: 10.1364/AO.532057
WoS-ID: 001314821900005
Scopus-ID: 2-s2.0-85204337983
URI: https://enauka.gov.rs/handle/123456789/938508
Metadata source: (Preuzeto iz Nasi u WoS)
M-category: 
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