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Global search algorithms in an automated design of starting points for a deep-UV lithography objective
| Naziv: | Global search algorithms in an automated design of starting points for a deep-UV lithography objective | Autori: | Zoric, Nenad; Nie, Yunfeng; Thibault, Simon; Prodanovic, Radomir; Thomas, Lijo | Godina: | 2024 | Publikacija: | APPLIED OPTICS | ISSN: | 1559-128X Applied Optics Pretraži identifikator |
Tip rezultata: | Naučni članak | Kolacija: | vol. 63 br. 26 str. 6960-6960 | DOI: | 10.1364/AO.532057 | WoS-ID: | 001314821900005 | Scopus-ID: | 2-s2.0-85204337983 | URI: | https://enauka.gov.rs/handle/123456789/938508 | Izvor metapodataka: | (Preuzeto iz Nasi u WoS) | M-kategorija: | 22M22 - Međunarodni časopis kategorije M22 |
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