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Title  : | Plasma electronics - applications in microelectronic device fabrication | Authors: | Makabe, Toshiaki; Petrović, Zoran Lj.   |
Issue Date: | 2006 | Publisher: | New York : Taylor & Francis | Type: | Other | ISBN: | 0-7503-0976-8  Search Idenfier |
Collation: | str. 339 str. | VBS COBISS: | 566850 | URI: | https://plus.cobiss.net/cobiss/sr/sr/bib/566850#izum.si https://enauka.gov.rs/handle/123456789/986453 |
M-category: | Mp. category will be shown later |
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