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Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities
| Naziv: | Silicon selective etching by gold implantation: Feasibility and nanofabrication capabilities | Autori: | Scattolo, E; Cian, A; Llobet, J; Nogue, X Borrise; Mondal, S; Barozzi, M; Bagolini, A; Crivellari, M; Perez, Murano F; Giubertoni, D | Godina: | 2025 | Publikacija: | MICRO AND NANO ENGINEERING | ISSN: | 2590-0072 MICRO AND NANO ENGINEERING Pretraži identifikator |
Tip rezultata: | Naučni članak | Kolacija: | vol. 28 str. 100308-100308 | DOI: | 10.1016/j.mne.2025.100308 | WoS-ID: | 001527042000002 | Scopus-ID: | 2-s2.0-105009462874 | URI: | https://enauka.gov.rs/handle/123456789/992542 | Izvor metapodataka: | (Preuzeto iz Nasi u WoS) | M-kategorija: | 21M21 - Vodeći međunarodni časopis kategorije M21 |
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