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The Implementation of the Surface Charging Effects in Three-Dimensional Simulations of SiO<sub>2</sub> Etching Profile Evolution
| Naziv: | The Implementation of the Surface Charging Effects in Three-Dimensional Simulations of SiO&lt;sub&gt;2&lt;/sub&gt; Etching Profile Evolution | Autori: | Rađenović, Branislav   ; Radmilović-Rađenović, Marija |
Godina: | 2014 | Publikacija: | Engineering | ISSN: | 1947-3931  Pretraži identifikator |
Tip rezultata: | Naučni članak | Kolacija: | vol. 06 br. 01 str. 1-6 | DOI  : | 10.4236/eng.2014.61001 | URI: | https://enauka.gov.rs/handle/123456789/298090 | Izvor metapodataka: | Migrirano iz RIS podataka | M-kategorija: | Mp kategorija će biti prikazana naknadno. |
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