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Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher
| Title: | Phase-resolved optical emission spectroscopy for an electron cyclotron resonance etcher | Authors: | Milosavljević, Vladimir   ; MacGearailt, Niall; Cullen, P. J.; Daniels, Stephen; Turner, Miles M. |
Issue Date: | 2013 | Publication: | Journal of Applied Physics | ISSN: | 0021-8979 Journal of Applied Physics Search Idenfier |
Type: | Article | Collation: | vol. 113 br. 16 str. 163302-163302 | DOI: | 10.1063/1.4802440 | WoS-ID: | 000318550300010 | Scopus-ID: | 2-s2.0-84877313629 | URI: | https://enauka.gov.rs/handle/123456789/375647 https://physrep.ff.bg.ac.rs/handle/123456789/578 |
Metadata source: | Migracija | M-category: | 21M21 |
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