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Title: Functional separation in two frequency operation of an inductively coupled plasma
Authors: Denda, T; Miyoshi, Y; Komukai, Y; Goto, T; Petrovic, Zoran Lj  ; Makabe, Toshiaki
Issue Date: 2004
Publication: JOURNAL OF APPLIED PHYSICS
ISSN: 0021-8979 Journal of Applied Physics Search Idenfier
Type: Article
Collation: vol. 95 br. 3 str. 870-876
DOI: 10.1063/1.1636527
WoS-ID: 000188281800011
Scopus-ID: 2-s2.0-1142304540
URI: https://enauka.gov.rs/handle/123456789/829659
Metadata source: (Preuzeto iz Nasi u WoS)
M-category: 
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